TURBO TM 1100 - 2200 A TURBO是来自Busch的涡轮分子真空泵。涡轮真空泵是为工业高真空应用而开发的,设计用于高达1·10-10 hPa (mbar)的高真空应用和高抽速或气体流速。气体输送时不需要任何操作流体。即使是最高负荷或任何不必要的气体泄漏也不会影响涡轮真空泵的高抽速。真空泵可在任何安装位置操作。紧凑的转子设计在同类产品中是无与伦比的,并将最高的泵容量与最小的尺寸相结合。驱动单元和控制系统完全集成在泵壳内。密封气体和冲洗连接是标准配置。涡轮真空泵是理想的使用在众多工业高真空应用,如:真空炉表面处理镀膜装置物理气相沉积(PVD)薄膜涂层涡轮涡轮分子真空泵根据涡轮原理工作。快速旋转的动叶在静叶之间旋转。 This causes impulses to be sent to the disordered gas particles inside the vacuum pump, which in turn causes a controlled stream of gas to move from the inlet to the outlet of the vacuum pump. To generate this momentum, the rotors reach a peripheral speed of >30.000 min-1. The integrated high-pressure stage permits a higher fore-vacuum and therefore, smaller backing pumps. The permanently lubricated ceramic bearings have a mean time between failures of more than 200.000 hours.